From Prototype to Production: Scaling a Custom Wafer Heater Project

https://flexible-thermal-guide.timeforchangecounselling.com/how-a-kapton-heater-provides-heat-in-space-constrained-designs

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result