A Practical OEM Checklist for Specifying a Mica Heater

https://blogfreely.net/hithimeesi/common-wafer-heater-design-challenges-in-semiconductor-equipment

In heated plates, a mica heater must deliver heat in a controlled way. It uses a resistive heating circuit supported and insulated by mica. One useful trait is high-temperature capability. Still, mechanical stress can change the result